The Application of MEMS Pressure Sensors

MEMS is a high-tech that has flourished on the basis of integrated circuit production technology and specialized microelectromechanical processing methods. Its research and development mainly focuses on three aspects: micro sensors, micro actuators, and micro systems. Currently, the sensors that dominate the MEMS market have formed an industry. The various microsensors developed using this technology have the advantages of small size, light weight, fast response, high sensitivity, easy production, and low cost, and can measure various physical, chemical, and biomass quantities. Next, I will mainly introduce the pressure sensor.

Pressure sensors: MEM pressure sensors are widely used. Industrial electronics: industrial ingredient weighing, digital flow meters, digital pressure gauges, etc. Consumer electronics: Liquid level control pressure sensors for solar water heaters, dishwashers, water dispensers, washing machine air conditioning pressure sensors, microwaves, health scales, blood pressure gauges, and more. Automotive electronics: common rail pressure sensors for diesel engines, intake manifold pressure sensors for automotive engines, air pressure sensors for automotive braking systems, and engine oil pressure sensors. I mainly talk about the applications of MEMS pressure sensors in the automotive industry, medical market, and industrial field.

Application in the industrial field: The main applications of MEMS pressure sensors include heating, ventilation, and air conditioning (HVAC), horizontal surface measurement, and various industrial process and control applications. For example, in addition to precise altitude and pressure measurements, airplanes use sensors to monitor other components such as engines and flaps.

Applied to the automotive industry: Under the multiple effects of market guidance, technology promotion, venture capital, and government intervention, automotive MEMS sensors have developed rapidly and have become a hot spot for relevant departments to invest and develop. A new application of MEMS pressure sensors in automobiles is transmission system pressure sensing, typically used in automatic devices, but also in new dual clutch transmission systems. In high-end cars, approximately 25 to 40 MEMS sensors are used, and the technology is becoming increasingly mature and perfect, which can meet the requirements of harsh automotive environments, high reliability, accurate accuracy, and low cost, greatly promoting the application of electronic technology in automobiles. For example, a German manufacturer has launched a MEMS solution that uses oil to protect the silicon film, allowing it to withstand up to 70 bar of pressure. A few years ago, Bosch also brought significant changes to MEMS pressure sensors, using porous silicon, bringing highly reliable MEMS devices that have been used in current applications such as side airbags.

Application in the medical market: For medical applications, MEMS pressure sensor technology requires specialized technology for producing precision low pressure measuring devices for invasive or non-invasive applications. Pressure sensors used for invasive applications, such as monitoring blood pressure, are low-cost consumables. Pressure sensors are used to measure vital signs. In this field, devices that use sensors include desktop or central monitors, as well as multi-parameter monitoring devices. Low end equipment includes at least one non-invasive pressure sensor; Midrange devices include one or two types of devices; High end devices include both non-invasive pressure sensors and invasive onesPressure sensors, as well as additional respiratory pressure sensing. In the field of implanted devices, pressure sensors are used for heart monitors, glaucoma monitors, and intracranial pressure monitors. Although the market for these monitors is currently in its developmental stage, their future potential is enormous. For example, using heart sensors can monitor patients at home without the need for frequent hospital examinations, which can save the country significant costs. Of course, it also brings convenience to patients. In terms of the disposable medical product market, such as disposable heart catheters used to monitor blood pressure during millions of surgeries a year, MEMS pressure sensors, and infusion pumps, these devices are used to input liquid, medication, or nutrition into the patient's circulatory system. The infusion pump has a simple structure and low cost, and can be thrown away immediately after use. In 2016, the usage of such pressure sensors was much higher than 60 million. Respiratory monitoring is another major application of medical pressure sensors. The annual sales of respiratory therapy related devices reach millions.

Summary: Automotive applications are still the largest market for MEMS pressure sensors. Especially for automotive electronics, it is becoming increasingly important for MEMS pressure sensors, and in recent years, its demand has increased rapidly. For example, Jieshen Electronics' annual demand for it has reached 2 to 3 million units. In addition, MEMS pressure sensors have also found some new applications in different fields, such as in cylinder pressure sensing for vehicles, continuous positive pressure respirators for medical use, and navigation applications combined with GPS. Although some of these applications are still in their early stages, they all seem to have great potential for growth. With the advancement of technology, the demand for MEMS pressure sensors in the market will be increasing, and the development prospects are extremely broad.